| 超宽带高饱和单行载流子光探测器研究 （特邀） |
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| 引用本文： | 熊兵,晁恩飞,罗毅,孙长征,韩彦军,王健,郝智彪,汪莱,李洪涛.超宽带高饱和单行载流子光探测器研究 （特邀）[J].红外与激光工程,2021,50(7):20211052-1-20211052-6. |
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| 作者姓名： | 熊兵 晁恩飞 罗毅 孙长征 韩彦军 王健 郝智彪 汪莱 李洪涛 |
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| 作者单位： | 清华大学 电子工程系 北京信息科学与技术国家研究中心，北京 100084 |
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| 摘 要： | 超宽带单行载流子（UTC）光电探测器因其仅需快速的电子输运过程，较传统PIN探测器具有明显宽带优势，是6G宽带无线通信、太赫兹成像、超宽带噪声发生器等亚太赫兹频段系统中的核心光电子器件之一。面向亚太赫兹频段光电转换需求，针对UTC探测器中大带宽与高饱和功率之间的矛盾问题，分别研究并突破了光生载流子高速输运机理、感性共面波导器件（CPW）结构等关键技术，研制成功带宽106 GHz、饱和输出功率7.3 dBm的双漂移层结构MUTC探测器芯片，和带宽超过150 GHz的超宽带MUTC探测器芯片。
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| 关 键 词： | 光探测器 单行载流子结构 亚太赫兹 高饱和功率 |
| 收稿时间： | 2021-04-04 |
Research on ultra-wideband and high saturation power uni-traveling carrier photodetectors (Invited) |
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| Affiliation: | Beijing National Research Center for Information Science and Technology, Department of Electronic Engineering, Tsinghua University, Beijing 100084, China |
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| Abstract: | Ultra-wideband uni-traveling carrier (UTC) photodetectors have broadband advantages over traditional PIN detectors, as only fast electrons are required to transport in UTC photodetectors. They will be one of the key optoelectronic devices in the sub-terahertz systems, such as 6G broadband wireless communications, terahertz imaging, ultra-wideband noise generators, etc. For the requirements of optoelectronic conversion in sub-terahertz frequency band, high-speed photo-generated carrier transport mechanics and inductive coplanar waveguide (CPW) structure were studied to improve the device bandwidth and saturation power of the photodetector. A dual-drift layer structure MUTC photodetector chip with bandwidth of 106 GHz, saturated output power of 7.3 dBm, and a CPW-optimized MUTC photodetector chip with bandwidth over 150 GHz were developed. |
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