面向代理的半导体生产线建模技术研究

为了有效分析和评价基于多代理的半导体生产线调度与控制性能，提出了面向代理的有色赋时Petri网的半导体生产线建模方法。将设备代理内部行为进行封装，建立了设备代理的有色赋时Petri网模型。同时，将半导体生产线多代理模型按层次划分为设备代理层、设备组层和系统层，有效地降低了模型的复杂性，提高了模型的可重用性。建立了分布式半导体生产线仿真平台，以实现基于面向代理的着色赋时Petri网的半导体生产线仿真定量分析与评价。以上海某半导体制造企业6英寸晶圆生产线为例，其仿真结果验证了建模与仿真的有效性。

Research on AOCTPN based modeling technology of semiconductor fabrication line

To effectively analyze & evaluate performance of control and scheduling strategies for multi-agent based semiconductor prodcution line, an agent-oriented colored timed Petri net (AOCTPN) modeling technology was proposed. The interior behavior of machine agent was encapsulated so that colored timed Petri net based machine agent model was setup. Hierarchical multi-agent based semiconductor production line model was divided into machine agent layer, machine group layer and system layer so as to reduce complexity and improve reuse of the model. Besides, a distributed simulation platform was constructed to implement analysis & evaluation of the performance of scheduling and control of AOCTPN based semiconductor production line. An illustrative example of 6 inches semiconductor production line in Shanghai indicated the effectiveness of the approach.