| [(BaTiO3)m/(SrTiO3)m]n超晶格生长的RHEED实时研究 |
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| 引用本文： | 魏雄邦,姜斌,李燕,邓宏,蒋书文,张鹰,姚海军.[(BaTiO3)m/(SrTiO3)m]n超晶格生长的RHEED实时研究[J].压电与声光,2005,27(2):178-181. |
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| 作者姓名： | 魏雄邦 姜斌 李燕 邓宏 蒋书文 张鹰 姚海军 |
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| 作者单位： | 电子科技大学,微电子与固体电子学院,四川,成都,610054 |
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| 摘 要： | 利用反射高能电子衍射(RHEED)，研究了在SrTiO3(100)基片上采用激光分子束外延法生长的(BaTiO3)m／(SrTiO3)m]n超晶格薄膜的生长特性。观察到清晰明亮的反射高能电子衍射花样及富有周期性的RHEED振荡曲线，制备的超晶格呈现良好的结晶层状外延生长，薄膜表面及界面的平整度很好。
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| 关 键 词： | 反射高能电子衍射（RHEED） 超晶格 外延生长 |
| 文章编号： | 1004-2474(2005)02-0178-04 |
| 修稿时间： | 2003年7月14日 |
Real time Study of the Growth of[(BaTiO3)m/(SrTiO3)m]n Superlattices Film with RHEED |
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| WEI Xiong-bang,JIANG Bin,LI Yan,DENG Hong,JIANG Shu-wen,ZHANG Ying,YAO Hai-jun.Real time Study of the Growth of[(BaTiO3)m/(SrTiO3)m]n Superlattices Film with RHEED[J].Piezoelectrics & Acoustooptics,2005,27(2):178-181. |
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| Authors: | WEI Xiong-bang JIANG Bin LI Yan DENG Hong JIANG Shu-wen ZHANG Ying YAO Hai-jun |
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| Abstract: | BaTiO_3)_m/(SrTiO_3)_m]_n superlattices film were grown on SrTiO_3 (100) substrate by laser molecular beam epitaxy(L-MBE) and the growth of which was studied with RHEED. The pattern and the intensity oscillations of RHEED show a layer-by-layer growth mode and good crystalline structure. The results also show that the interfaces and the surface of the superlattices film are very smooth. |
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| Keywords: | RHEED superlattices epitaxy growth |
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