| IDT/AlN/LiNbO3结构声表面波滤波器模拟和分析 |
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| 引用本文： | 李健雄,杨成韬,王锐,陈运祥,张树人.IDT/AlN/LiNbO3结构声表面波滤波器模拟和分析[J].压电与声光,2008,30(6). |
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| 作者姓名： | 李健雄 杨成韬 王锐 陈运祥 张树人 |
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| 作者单位： | 1. 电子科技大学电子薄膜与集成器件国家重点实验室,四川,成都,610054
2. 四川压电与声光技术研究所,重庆,400060 |
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| 摘 要： | 研究了IDT/AlN/LiNbO3结构声表面波滤波器的频散特性,发现了高机电耦合系数(>18%),高声速(>10 km/s)的纵向假声表面波模式。对研究得到的二次模进行了归一化插入损耗频率响应的模拟,其结果与文献报道的实验结果基本一致。
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| 关 键 词： | 声表面波 AlN薄膜 假声表面波 模拟 |
The Modeling and Analysis of Surface Acoustic Wave Filter Based on IDT/AIN/LiNbO3 |
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| LI Jian-xiong,YANG Cheng-tao,WANG Rui,CHENG Yun-xiang,ZHANG Shu-ren.The Modeling and Analysis of Surface Acoustic Wave Filter Based on IDT/AIN/LiNbO3[J].Piezoelectrics & Acoustooptics,2008,30(6). |
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| Authors: | LI Jian-xiong YANG Cheng-tao WANG Rui CHENG Yun-xiang ZHANG Shu-ren |
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| Abstract: | The frequency dispersive characteristics of surface acoustic wave(SAW) based on the structure of IDT/AlN/LiNbO3 are theoretically investigated,which results in the discovery of lognitudinal pseudo SAW mode.The electromechanical coupling coefficient is bigger than 18%,and acoustic speed is higher than 10 km/s.The normalized insert loss frequency response is simulated using the second mode,which is basically consistent to the reported result. |
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| Keywords: | SAW AlN thin film pseudo SAW modeling |
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