Scattering mechanism and reduction of insertion losses in a laminated polarization splitter

We experimentally found the unexpected phenomena of scattering in laminated polarization splitters (LPS's) composed of a-Si:H-SiO(2) multilayer and studied its mechanism. The scattering phenomena strongly depend on the incident angle and polarization of the incident light. To reduce the scattering loss in LPS's, a multilayer with flat layer boundaries is fabricated with rf bias sputtering. As a result, the insertion loss of the LPS is reduced to ~ 1 × 10(-3) dB/ μm, which is acceptable for practical uses.