| 电容型湿度传感器模型计算与分析 |
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| 引用本文： | 单晓锋,杨建红.电容型湿度传感器模型计算与分析[J].半导体技术,2010,35(11):1138-1141. |
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| 作者姓名： | 单晓锋 杨建红 |
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| 作者单位： | 兰州大学,物理科学与技术学院,兰州,730000;兰州大学,物理科学与技术学院,兰州,730000 |
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| 摘 要： | 以菲克第二扩散定律为基础,建立湿度传感器器件三明治结构模型,对聚酰亚胺电容型湿度传感器进行全面数值模拟,分析其电场分布、升降湿的动态过程及响应时间,并与实验结果进行对比分析.引入了自由体积理论对湿度传感器升、降湿过程的影响,使模拟过程更加符合实际情况,结果显示模拟结果和实验数据吻合良好,并根据对模拟结果分析,发现电极宽度是制约传感器性能的关键参数.该模型能够较准确预测制备的电容型湿度传感器性能,以此来指导高性能湿度传感器研究.
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| 关 键 词： | 聚酰亚胺 湿度传感器 菲克第二扩散定律 动态响应 自由体积理论 |
Simulation and Analysis of Capacitive Humidity Sensors |
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| Shan Xiaofeng,Yang Jianhong.Simulation and Analysis of Capacitive Humidity Sensors[J].Semiconductor Technology,2010,35(11):1138-1141. |
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| Authors: | Shan Xiaofeng Yang Jianhong |
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| Affiliation: | Shan Xiaofeng,Yang Jianhong(School of Physical Science and Technology,Lanzhou University,Lanzhou 730000,China) |
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| Abstract: | The sandwich structure model of humidity sensor devices was built based on the Fick second law.The capacitive polyimide humidity sensor was simulated completely.According to the simulation result,the electric field distribution,dynamic process and response time were analyzed and compared with the test results.The free volume theory was introduced into the model so that the simulation could fit the actual situation better.Through the simulation calculation,it is found that the line width is the key factor to... |
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| Keywords: | polyimide humidity sensor Fick second diffusion law dynamic response free volume theory |
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