多孔SiO2膜的制备和增透性能研究

采用溶胶-凝胶结合旋转涂膜法在玻璃基底上制备SiO2薄膜,研究了陈化时间和旋涂速度对SiO2膜增透性能的影响,利用热分析仪、X射线衍射仪、红外光谱仪、扫描电镜、分光光度计、椭偏仪等方法分别对干凝胶的热分解过程、晶体结构、微观形貌、透过率和折射率进行表征.结果表明:膜层透过率与制备条件有一定的规律,随着陈化时间的延长和旋涂速度的增加,增透峰中心波长发生了移动.在最佳工艺条件下,制备的SiO2薄膜具有较好的增透性能,在玻璃上镀SiO2增透膜后,峰值透过率(300～1000 nm)由90％提高到95％,其膜厚为315 nm,折射率为1.352,孔隙率为27％,进一步提高了可见光利用率.

Study on Preparation and Anti-reflective Properties of Porous SiO2 Film

Sol-gel method was introduced to prepare porous SiO2 films coated onto glass substrates.The effects of the aging time,spinning rate on the anti-reflective properties of SiO2 films have been studied.The thermal decomposition,crystal structure,microstructure,transmittance and refractive index of the samples were characterized by TG-DSC,XRD,FT-IR,SEM,spectrophotometer and ellipsometer.The results showed that the transmittance of films controlling by changing preparation conditions,the center wavelength of the peak have shift with increase of the aging time and spinning rate.On the optimum conditions,the transmittance of the glass substrates is increased from 90% to 95% after coated with these anti-reflective films in the wavelength range from 300 to 1000 nm.The thickness of films is 315 nm,refractive index is 1.352,porosity is 27%.As a result,the utilization of light is further increased.