Low-loss single-mode GaAs/AlGaAs miniature optical waveguides withstraight and bending structures

Low-loss single-mode GaAs/AlGaAs miniature optical waveguides fabricated for use in monolithically integrated optical circuits are discussed. The propagation characteristics of these waveguides with straight and S-bending structures have been investigated at wavelengths of 1.30 and 1.55 μm. The lowest propagation losses are estimated to be 0.58 dB/cm and 0.69 dB/cm at wavelengths of 1.30 and 1.55 μm, respectively. The total loss of an S-bending waveguide with a curvature radius of 2 mm and with a lateral displacement of 200 μm was 0.61 dB and 0.46 dB at wavelengths of 1.30 and 1.55 μm. The fabricated single-mode strip-loaded waveguides proved to be suitable for application of the semiconductor waveguide into monolithically integrated optical circuits