Coplanar Waveguide Using Ferroelectric Thin Oxide Film: Dielectric Constant |
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Authors: | W J Kim S S Kim T K Song S E Moon E K Kim S J Lee S K Han M H Kwak H Y Kim Y T Kim H C Ryu C S Kim K Y Hang |
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Affiliation: | (1) Changwon National University, Sarim-Dong 9, Changwon, Korea;(2) Basic Research Laboratory, Electronics and Telecommunications Research Institute, Gajeong-Dong 161, Taejon, Korea |
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Abstract: | Coplanar waveguide (CPW) transmission lines were fabricated on thin ferroelectric Ba1 – xSrxTiO3 films for tunable microwave applications. The growth of the ferroelectric oxide films was accomplished by a pulsed laser deposition with a partial oxygen background. Microwave properties of the CPW phase shifter were measured using a HP 8510C vector network analyzer from 0.045–20 GHz with –40–40 V of dc bias. A large phase shift angle of 120 at 10 GHz was observed from the CPW (gap = 4m, length = 3 mm) with a 40 V of dc bias change. The dielectric constant of the thin ferroelectric film was extracted from the dimension of the CPW (gap, width, length) and the measured S-parameter by a modified conformal mapping. However, the dielectric constant of the ferroelectric thin film exhibits a gap dependency; dielectric constant (990–830) decreases with increasing gap size (4–19 m, respectively). By adjusting the filling factors of the film, a constant dielectric constant of BST film is found to be 810 ± 5. |
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Keywords: | (Ba Sr)TiO3 thin film ferroelectric conformal mapping phase shifter microwave |
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