Mathematical Modeling and Analysis of MEMS Deformable Mirror Actuated by Electrostatic Piston Array

In this report, we constructed a simple mathematical analysis model for a new MEMS deformable mirror using an electrostatic piston array. The deformable mirror has been developed as a wavefront compensation device in adaptive optics for retinal observation. The device realizes a large convex deformation with a low operation voltage because of moving bottom electrodes on the pistons. The constructed model is based on the plate theory and simple superposition of the actuation components. The calculated deformation analyzed using this model agrees well with that analyzed using the finite element method not only in deformation shape but the peak‐valley deformations. In addition, the calculation time is much shorter, so the model can be used for design optimization of the device.