铝合金功能薄膜与溅射靶材

近年来 ,铝合金广泛用于生产多种功能薄膜。作为制备高性能溅射薄膜用的铝合金靶材也得到了相应的应用。本文重点介绍应用于不同领域的几种铝合金功能薄膜 ,简述了铝合金薄膜与溅射靶材的制备工艺、铝合金靶材的显微结构及其对溅射薄膜性能的影响 ,最后指出了铝合金薄膜及溅射靶材的发展趋势

Aluminum Alloy Films and Sputtering Targets

Aluminum alloy sputtering targets materials have attracted much research interest because of the wide applications of various Al alloy functional films.Some major research aspects,such as the preparation techniques of Al alloy targets materials and films,the microstructures of Al target materials and their influence on the films grown by sputtering,were discussed.The development trends of Al alloy films as well as Al alloy targets materials were also discussed.