| 窗口型极小孔激光器的研制 |
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| 引用本文： | 康香宁,徐云,宋国峰,叶晓军,陈良惠.窗口型极小孔激光器的研制[J].半导体学报,2003,24(11):1145-1148. |
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| 作者姓名： | 康香宁 徐云 宋国峰 叶晓军 陈良惠 |
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| 作者单位： | 中国科学院半导体研究所 北京100083
(康香宁，徐云，宋国峰，叶晓军)，中国科学院半导体研究所 北京100083(陈良惠) |
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| 基金项目： | 国家高技术研究发展计划资助项目 (No.2 0 0 2 AA3 13 0 60 )~~ |
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| 摘 要： | 报道了一种窗口型的用于高分辨率近场光学存储领域的极小孔激光器.这种窗口结构的引入解决了出射端面处由于金属膜的存在而导致的pn结短路问题,同时一定程度上抑制了激光器腔面处的COD效应.简化了极小孔激光器的工艺,降低了制备难度,提高了激光器的输出特性.通过FIB设备制备出了小孔大小为4 0 0 nm,工作电流在31m A时的出光功率约0 .3m W的极小孔激光器
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| 关 键 词： | 极小孔激光器 近场光学 脊形波导 聚焦离子束 |
Fabrication of Windowed Very-Small-Aperture Laser Diodes |
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| Kang Xiangning,Xu Yun,Song Guofeng,Ye Xiaojun,Chen Lianghui.Fabrication of Windowed Very-Small-Aperture Laser Diodes[J].Chinese Journal of Semiconductors,2003,24(11):1145-1148. |
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| Authors: | Kang Xiangning Xu Yun Song Guofeng Ye Xiaojun Chen Lianghui |
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| Abstract: | A windowed very small aperture laser (VSAL) source for use in high resolution near field optical data storage is fabricated.The windowed regions are introduced to avoid shorting the pn junction with metal coating and suppress the COD effect.It facilitates producing VSAL by simplified technology and improves the laser performance.A VSAL with 400nm small aperture is demonstrated by focused ion beam (FIB) and the output power is 0 3mW at 31mA. |
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| Keywords: | very small aperture laser optical near field ridge waveguide focused ion beam |
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