| 双光束激发改进纳米氮化硅合成工艺 |
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| 引用本文： | 王锐,李道火,黄永攀,罗丽明,浦坦.双光束激发改进纳米氮化硅合成工艺[J].佛山陶瓷,2004,14(5):1-3. |
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| 作者姓名： | 王锐 李道火 黄永攀 罗丽明 浦坦 |
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| 作者单位： | 1. 中国科学院安徽光学精密机械研究所,230000;山东道钬纳米技术研究院,250100
2. 中国科学院安徽光学精密机械研究所,230000 |
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| 摘 要： | 氮化硅是优良的陶瓷材料，应用十分广泛。本文论述了激光诱导化学气相沉积法制备纳米氮化硅的工作原理，提出了减少游离硅的措施；采用双光束激发制备得到了超微非晶纳米氮化硅粉体。
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| 关 键 词： | 氮化硅 合成技术 陶瓷材料 SI3N4 激光诱导化学气相沉积法 吸收系数 双光束激发技术 |
Improvement of Synthesis Techniques of Silicon Nitride Nano-powder by Double Beam Optical Stimulation |
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| Wang Rui, Li Daohuo, Huang Yongpan, Luo Liming Pu Tan.Improvement of Synthesis Techniques of Silicon Nitride Nano-powder by Double Beam Optical Stimulation[J].Foshan Ceramics,2004,14(5):1-3. |
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| Authors: | Wang Rui Li Daohuo Huang Yongpan Luo Liming Pu Tan |
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| Affiliation: | Wang Rui1,2 Li Daohuo1,2 Huang Yongpan1,2 Luo Liming1 Pu Tan1 |
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| Abstract: | Silicon Nitride is a kind of excellent ceramic material used in many areas.In this article,the general principles of LICVD (Laser Induced Chemical Vapor Deposition)are investigated and measures to reduce dissociated Si are put forward.By applying double beam optical stimulation,ultrafine and amorphous Si3N4 nano-powder can be obtained. |
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| Keywords: | LICVD nano Si3N4 double beam optical stimulation |
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