| 放电等离子烧结Bi2O3/Cu复合梯度靶材 |
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| 引用本文： | 岳明,张东涛,刘卫强,张久兴.放电等离子烧结Bi2O3/Cu复合梯度靶材[J].稀有金属,2004,28(1):214-216. |
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| 作者姓名： | 岳明 张东涛 刘卫强 张久兴 |
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| 作者单位： | 北京工业大学新型功能材料教育部重点实验室,北京,100022 |
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| 摘 要： | 采用放电等离子烧结技术制备了Bi2O3/Cu复合梯度靶材，利用扫描电子显微镜和能谱分析仪对材料的微观组织形貌及成分进行了分析。结果表明，合成的复合梯度靶材具有宏观组织不均匀性和微观组织连续性的特征，显微组织中不存在微裂纹，减小了热应力的影响。与单一成分靶材相比，复合梯度靶材的热导率显著提高，解决了靶材在溅射过程中因散热不良而碎裂的问题，提高了其使用率。
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| 关 键 词： | 放电等离子烧结 Bi2O3／Cu 复合梯度靶材 |
| 文章编号： | 0258-7076(2004)01-0214-03 |
Preparation of Composite Graded Bi2O3/Cu Target by Spark Plasma Sintering |
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| Yue Ming ,Zhang Dongtao,Liu Weiqiang,Zhang Jiuxing.Preparation of Composite Graded Bi2O3/Cu Target by Spark Plasma Sintering[J].Chinese Journal of Rare Metals,2004,28(1):214-216. |
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| Authors: | Yue Ming Zhang Dongtao Liu Weiqiang Zhang Jiuxing |
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| Affiliation: | Yue Ming *,Zhang Dongtao,Liu Weiqiang,Zhang Jiuxing |
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| Abstract: | Composite graded Bi 2O 3/Cu target materials were produced by spark plasma sintering technique. Microstructure and constituents were investigated by means of scanning electron microscope with energy dispersive X ray detector. It is found that the target materials exhibit the micro structural characteristics of macroscopic inhomogeneity and microscopic continuity. Obvious atom diffusion between different composition layers can hardly be detected. There are no fine cracks in the interface, and the bonding states between conjoint layers are ideal. Compared with single composition target, the composite graded target possesses much better thermal conductance as well as the usage factor. |
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| Keywords: | spark plasma sintering Bi 2O 3/Cu composite graded target materials |
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