| 基于空间域系数的多变量工序能力指数 |
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| 引用本文： | 王少熙,王明辛,樊晓桠,张盛兵,韩茹.基于空间域系数的多变量工序能力指数[J].半导体学报,2013,34(2):026001-4. |
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| 作者姓名： | 王少熙 王明辛 樊晓桠 张盛兵 韩茹 |
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| 作者单位： | School of Software and Microelectronics,Northwestern Polytechnical University |
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| 基金项目： | 陕西省自然科学基金，西北工业大学基础研究基金 |
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| 摘 要： | After analyzing the multivariate Cpm method(Chan et al.1991),this paper presents a spatial multivariate process capability index(PCI) method,which can solve a multivariate off-centered case and may provide references for assuring and improving process quality level while achieving an overall evaluation of process quality. Examples for calculating multivariate PCI are given and the experimental results show that the systematic method presented is effective and actual.
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| 关 键 词： | process process capability index multivariate off-center |
| 修稿时间： | 8/6/2012 9:57:50 AM |
A multivariate process capability index with a spatial coefficient |
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| Wang Shaoxi,Wang Mingxin,Fan Xiaoy,Zhang Shengbing and Han Ru.A multivariate process capability index with a spatial coefficient[J].Chinese Journal of Semiconductors,2013,34(2):026001-4. |
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| Authors: | Wang Shaoxi Wang Mingxin Fan Xiaoy Zhang Shengbing and Han Ru |
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| Affiliation: | School of Software and Microelectronics, Northwestern Polytechnical University, Xi'an 710021, China |
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| Abstract: | After analyzing the multivariate Cpm method (Chan et al. 1991), this paper presents a spatial multivariate process capability index (PCI) method, which can solve a multivariate off-centered case and may provide references for assuring and improving process quality level while achieving an overall evaluation of process quality. Examples for calculating multivariate PCI are given and the experimental results show that the systematic method presented is effective and actual. |
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| Keywords: | process process capability index multivariate off-center |
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