| 直流负偏压对金刚石形核的影响 |
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| 引用本文： | 王建军,吕反修,刘应锴,于文秀,佟玉梅.直流负偏压对金刚石形核的影响[J].北京科技大学学报(英文版),1996(1). |
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| 作者姓名： | 王建军 吕反修 刘应锴 于文秀 佟玉梅 |
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| 作者单位： | 北京科技大学材料科学与工程系 |
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| 摘 要： | 本文研究了微波等离子体化学气相沉积金刚石薄膜中，直流负偏压的大小、施加的时间和施加偏压期间的甲烷浓度对光滑Ｓｉ衬底上金刚石形核的影响．发现适当的衬底负偏压可以极大地促进金刚石的形核，而过高或过低的偏压则都不利于形核。
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| 关 键 词： | 金刚石膜，形核，直流偏压 |
EFFECT OF NEGATIVE BIAS ON DIAMOND NUCLEATION IN MICROWAVE PLASMA ASSISTED CHEMICAL VAPOR DEPOSITION SYSTEM |
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| WANG JIANJUN,LU FANXIU,LIU YINGKAI,YU WENXIU,TONG YUMEI.EFFECT OF NEGATIVE BIAS ON DIAMOND NUCLEATION IN MICROWAVE PLASMA ASSISTED CHEMICAL VAPOR DEPOSITION SYSTEM[J].Journal of University of Science and Technology Beijing,1996(1). |
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| Authors: | WANG JIANJUN LU FANXIU LIU YINGKAI YU WENXIU TONG YUMEI |
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| Abstract: | Effect of direct current negative bias on diamond nucleation in microwave plasma assisted chemical vapor deposition system was discussed. The influence of the magnitude of negative bias value,bias duration and methane concentration in the gas mixture on nucleation density of diamond films was studied respectively. It is demonstrated that direct current negative bias can drastically enhance the diamond nucleation at a suitable value.Long bias duration and high methane concentration are helpful for diamond nucleation. |
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| Keywords: | diamond films nucleation DC bias |
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