微光机械振动传感器的设计与制作

采用旋涂和干法刻蚀技术,制作了一种新型有机集成微光机械振动传感器,其主要结构是由在硅基上制作的聚甲基丙烯酸甲酯(PMMA)悬臂梁和光波导集成光路组成,探测光路采用强度调制型开环差分探测,利用光-机转换功能,实现对微小振动量的检测。通过对该器件结构参数的优化设计和幅频特性分析表明,所制备的器件具有灵敏度高、线性度好、抗电磁干扰、工艺简单、成本低等优点。

Design and Fabrication of Micro-Opto-Mechanical Vibration Sensor

A novel organic integrated micro-opto-mechanical vibration sensor was fabricated by spin coating and dry etch technique.The primary structure was made up of the integrated circuit of optical waveguide,and the cantilever which was made by the polymethyl methacrylate(PMMA)on silicon substrate.Intensity modulation open loop difference detection optical path was applied to detect micro-vibration by optics-mechanics change-over function.Optimum design of structure parameter and theoretical analysis of amplitude-frequency characteristic of the device indicated that the device was in possession of advantages such as higher sensitivity and good linearity,resist electromagnetic interference,process simplicity,low cost,etc.