| 微细加工技术在微光开关制造中的应用 |
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| 引用本文： | 茅昕辉,陈丹哗,吴茂松,蔡炳初.微细加工技术在微光开关制造中的应用[J].微细加工技术,2002(1):71-75. |
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| 作者姓名： | 茅昕辉 陈丹哗 吴茂松 蔡炳初 |
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| 作者单位： | 1. 上海交通大学微纳米科学技术研究院,上海,200030
2. 东南大学机械工程系,南京,210096 |
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| 摘 要： | 微光开关是新一代全光通信网络中的关键器件。利用微细加工技术制造微光开关具有很多突出的优点，受到了广泛的研究。总结了几种典型的微光开关制造中运用的微细加工技术，并介绍了它们的应用和相应的特点。
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| 关 键 词： | 微光开关 全光网络 微细加工技术 表面加工 体加工 制造 |
| 文章编号： | 1003-8213(2002)01-0071-05 |
| 修稿时间： | 2001年6月1日 |
Applications of Microfabrication Technologies in Manufacturing Optical Switches |
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| MAO Xin hui ,CHEN Dan ye ,WU Mao song ,CAI Bing chu.Applications of Microfabrication Technologies in Manufacturing Optical Switches[J].Microfabrication Technology,2002(1):71-75. |
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| Authors: | MAO Xin hui CHEN Dan ye WU Mao song CAI Bing chu |
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| Affiliation: | MAO Xin hui 1,CHEN Dan ye 2,WU Mao song 1,CAI Bing chu 1 |
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| Abstract: | Optical switches are the key device to the realization of the new all optical communication networks. Manufacturing them by microfabrication technologies has shown many outstanding advantages, and was studied extensively. The microfabrication technologies used in making several typical kings of optical switches were reviewed. Their applications and characters were described. |
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| Keywords: | optical switch all optical networks microfabrication technology surface micromachining bulk micromachining |
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