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微齿轮轴的微细电火花加工
引用本文:褚旭阳,狄士春,王振龙.微齿轮轴的微细电火花加工[J].吉林大学学报(工学版),2010,40(6).
作者姓名:褚旭阳  狄士春  王振龙
基金项目:国家自然科学基金重点项目
摘    要:采用微细电火花铣削与微细电火花线切割组合加工复杂微小零件。以带轴的微小齿轮为例,在分析其结构特点及微细电加工特性的基础上,规划了微小齿轮轴的组合电加工工艺流程,分析了组合加工中的精度和效率,实现了节圆直径为350μm的微小齿轮轴的制造。

关 键 词:微机电系统  微细电火花铣削加工  微细电火花线切割加工

Fabrication of micro-gear shaft on micro-EDM
CHU Xu-yang,DI Shi-chun,WANG Zhen-long.Fabrication of micro-gear shaft on micro-EDM[J].Journal of Jilin University:Eng and Technol Ed,2010,40(6).
Authors:CHU Xu-yang  DI Shi-chun  WANG Zhen-long
Abstract:Micro Electrical Discharge Machining(micro-EDM) process and micro Wire Electrical Discharge Machining(micro-WEDM) process have been proven to be appropriate techniques for fabrication of three-dimensional micro parts and high aspect ratio micro structures.The structural feature of micro-gear shaft and the machining characteristics of micro-EDM and micro-WEDM were analyzed in this paper.Then a process flow for fabrication of micro-gear shaft was proposed,which combines micro-EDM and micro-WEDM,and the machining accuracy and efficiency were analyzed.A micro-gear shaft with pith diameter of 350 μm was fabricated by this method.
Keywords:MEMS  Micro-EDM milling  Micro-WEDM
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