| 非晶硅太阳能电池背反ZnO:Al薄膜制备 |
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| 引用本文： | 肖海波,曾湘波,刘石勇,彭文博,石明吉,张长沙.非晶硅太阳能电池背反ZnO:Al薄膜制备[J].硅酸盐学报,2010,38(1). |
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| 作者姓名： | 肖海波 曾湘波 刘石勇 彭文博 石明吉 张长沙 |
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| 作者单位： | 中国科学院半导体研究所,北京,100083 |
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| 基金项目： | 国家973计划(2006CB202604);;国家自然科学基金(60576036)资助项目 |
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| 摘 要： | 以ZnO:Al(2%Al2O3,质量分数)为靶材,用射频磁控溅射在玻璃衬底上制备ZnO:Al薄膜,分析了各沉积参数对薄膜光电性能的影响。结果表明:溅射功率对ZnO:Al的透过率影响最大,其次是反应腔室压力,而衬底温度对透过率几乎没有影响。ZnO:Al的电阻率主要取决于衬底温度和溅射功率。综合考虑透过率和电阻率,确定了背反ZnO:Al的最佳沉积参数(衬底温度为200℃,溅射功率为200W,反应腔室压力为0.6Pa),得到了透过率大于85%,电阻率最小为7.6×10-4Ωcm的ZnO:Al薄膜。制备了ZnO:Al/Ag/ss(stainless steel)背反电极,并将其用于非晶硅太阳能电池。与无背反的不锈钢衬底上的电池相比,非晶硅太阳能电池短路电流密度增加了16%。
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| 关 键 词： | 掺铝氧化锌薄膜 背反电极 非晶硅太阳能电池 磁控溅射 |
ZINC OXIDE:ALUMINUM FILMS AS BACK REFLECTOR IN AMORPHOUS SILICON SOLAR CELLS |
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| XIAO Haibo,ZENG Xiangbo,LIU Shiyong,PENG Wenbo,SHI Mingji,ZHANG Changsha.ZINC OXIDE:ALUMINUM FILMS AS BACK REFLECTOR IN AMORPHOUS SILICON SOLAR CELLS[J].Journal of The Chinese Ceramic Society,2010,38(1). |
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| Authors: | XIAO Haibo ZENG Xiangbo LIU Shiyong PENG Wenbo SHI Mingji ZHANG Changsha |
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| Affiliation: | Institute of Semiconductors;Chinese Academy of Sciences;Beijing 100083;China |
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| Abstract: | The ZnO:Al films were prepared on glass using a ZnO ceramic target with Al 2 O 3 of 2% in mass by radio frequency magnetron sputtering.The effect of deposition parameters (such as sputtering power,gas pressure and substrate temperature) on the optical and electrical properties of zinc oxide:aluminum (ZnO:Al) films was investigated.The results show that the transmittance of the ZnO:Al films is mainly affected by sputtering power and gas pressure.The substrate temperature has a slight impact on the transmitta... |
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| Keywords: | aluminum-doped zinc oxide thin films back reflectors amorphous silicon solar cells magnetron sputtering |
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