微机电系统集成设计方法与实现技术

针对微机电系统设计所存在的多学科交叉、周期长等问题，提出自顶向下设计与自底向上修正的双向微机电系统集成设计方法，将设计流程分为系统级、器件级和工艺级三个阶层；以微惯性器件为典型对象研究了各阶层的关键实现技术，并在此基础上构建微机电系统集成设计平台；所进行的硅微加速度计设计实例说明平台的设计流程可行，同时平台所具有的系统级、器件级和工艺级的多设计入口以及各阶层的全参数化驱动设计功能可提高微机电系统设计的效率。

Integrated Design Method for MEMS with Realization Technology

An integrated design methodology based on top-down design and bottom-up verification was proposed to solve the challenges in MEMS design such as multi-disciplinary design and long design period, where the methodology divided the MEMS design into three levels: system, device and process level. The key realization technologies involved were presented in the case of the inertial MEMS device. An integrated design platform MEMS Garden V3.0 was built with the technologies. The successful sample design of micro accelerometer under the platform proved the feasibility of the methodology. The platform's features such as parameter-driven design in every level and custom entrances for user facilitate the design and enhance the efficiency.