光学薄膜激光损伤阈值的智能检测研究

为了解决当前光学薄膜激光损伤阈值检测方法准确性差、可视化和灵活性不理想等难题,提出基于软件测试算法的光学薄膜激光损伤阈值检测方法。首先计算损伤阈值最终不确定度,并将不确定度计算结果代入损伤阈值检测中,然后利构成测量光路,激光在透镜上聚焦照射到待测样品上,根据测试软件程序对激光照射前后的图像进行预处理,判断是否存在损伤,若存在损伤,结合高斯光束理念获取有效光斑面积,最后损伤阈值,并进行了仿真实验,结果表明,该方法检测准确率和可视化程度高,且灵活性强。

Research on intelligent detection of laser damage threshold of optical thin films

In order to solve the problems of poor accuracy,visualization and flexibility of laser damage threshold detection methods for optical thin films,a laser damage threshold detection method for optical thin films based on software testing algorithm is proposed.Firstly,the final uncertainty of damage threshold is calculated,and the result of uncertainty is substituted into the detection of damage threshold.Then,the measurement light path is formed.Laser is focused on the lens and irradiated on the sample to be measured.According to the test software program,the image be?fore and after laser irradiation is preprocessed to determine whether there is damage.If there is damage,the effective spot surface is obtained by combining the concept of Gauss beam.Finally the threshold is damaged,and the simulation results show that the method has high detection accuracy and visualization,and is flexible.