压阻式压力传感器的在线综合补偿

利用曲面拟合法来建立被测目标参量与传感器输出量之间的对应关系,借助二维标定/校准实验,按最小二乘法原理由实验标定/校准数据计算出均方误差最小时的回归方程中的系数。这样,当测得了传感器的输出值时,就可由已知系数的多维回归方程来计算相应的输入被测目标参数。该算法应用于压阻式压力传感器,在进行温度补偿的同时也进行了非线性校正,使传感器的读数准确度达到0.05%,同时利用传感器自身的RS232接口对其进行在线补偿和校正。

On-line comprehensive compensation of piezoresistive pressure sensor

A corresponding relation between the object's parameters and the sensor output values is found by curved surface formulation. With the help of two dimension calibration and calibrated experiment,the coefficient in the regress equation under the condition of error-mean square is calculated in the light of minimum two multiplication principle. Thus, the object's (parameters) can be calculated out by known coefficient's multi-dimension regress equation once the sensor's output value measured. When the algorithm was applied to piezoresistive pressure sensor, it not only (benefits) temperature compensation but also helps non-linear rectifying.The accuracy of sensor can be reached (to 0.05*#%).Meanwhile,the sensor's self-RS232 interface is applied to on-line compensation and rectification.