| 衬底对SnO2薄膜结构的影响 |
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| 引用本文： | 李春芳,李忠明.衬底对SnO2薄膜结构的影响[J].咸宁学院学报,2000,20(3):53-55. |
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| 作者姓名： | 李春芳 李忠明 |
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| 作者单位： | [1]华中理工大学物理系 [2]咸宁师范高等专科学校物理系 |
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| 摘 要： | ＳｎＯ２透明导电膜的光学、电学特性与它的结构有关。研究守底温度对薄膜结构的影响表明：衬底温度影响薄膜的结晶程度，衬底温度高，容易结晶化，衬底温度低，则易形成无定型结构的膜。
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| 关 键 词： | 衬底温度 透明导电膜 薄膜结构 |
Effect of Substrate Temprature on the Structure of SnO_2 Films |
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| LI Chun-fang ,LI Zhong-ming ,SHA Xian-wu.Effect of Substrate Temprature on the Structure of SnO_2 Films[J].Journal of Xianning College,2000,20(3):53-55. |
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| Authors: | LI Chun-fang LI Zhong-ming SHA Xian-wu |
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| Affiliation: | LI Chun-fang 1,LI Zhong-ming 2,SHA Xian-wu 1 |
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| Abstract: | The optical and electrical properties of tranparent conducting-film are related to its structure.The effect of substrate temprature on the structure is studied.The result indicates that substrate temprature influences the crystallinity of SnO 2 films.The films are crystal at high temprature and amorphous crystal at low temprature. |
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| Keywords: | substrate temprature transparent conducting-film structure |
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