Fabrication and microstructure of boron-doped isotropic pyrolytic carbon |
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Authors: | Li Xu Junfeng Wu Shuo Bai |
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Affiliation: | Shenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences, Shenyang 110016, PR China |
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Abstract: | Boron-doped isotropic pyrolytic carbon (pyrocarbon) was prepared by CVD using CH4 + BCl3 + H2 as gaseous precursors. Microstructure of the deposited pyrocarbon on a graphite substrate was investigated using X-ray diffraction, X-ray photoelectron spectroscopy, polarized light microscopy, and scanning and transmission electron microscopy. It was found that the boron-containing pyrocarbon prepared exhibits a multi-scale structure, different from the pure isotropic pyrocarbon deposited under nearly the same experimental conditions. The multi-scale structure consists of carbon agglomerates of fine wrinkled graphitic sheets which contain substitutional boron and some micrometer-sized boron carbide particles uniformly distributed in the carbon agglomerates. Influence and mechanism of boron co-deposition during CVD process are also discussed. |
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