| SmCo5硬磁薄膜的制备研究 |
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| 引用本文： | 雷勇,代波,邵晓萍.SmCo5硬磁薄膜的制备研究[J].四川师范大学学报(自然科学版),2012(1):105-108. |
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| 作者姓名： | 雷勇 代波 邵晓萍 |
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| 作者单位： | 西南科技大学材料科学与工程学院 |
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| 基金项目： | 国家自然科学基金(10704061)资助项目 |
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| 摘 要： | 以Cr层为底层和保护层,采用直流共溅射的方法在Si基片上制备了Cr(80 nm)/SmCo5(300nm)/Cr(8 nm)薄膜,并对样品进行550℃保温30 min的退火,然后分别利用EDX射线能谱仪、X射线衍射仪、原子力显微镜、振动样品磁强计分析研究了退火前后SmCo5薄膜样品的成分、结构、表面形貌、磁学性能及其变化规律.结果表明:在10-4Pa真空环境下,SmCo5薄膜在550℃退火,保温30 min后具有较好的硬磁性能,矫顽力Hc为1 738 Oe.
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| 关 键 词： | SmCo5薄膜 共溅射 退火温度 矫顽力 |
Preparations and Studies of the SmCo5 Hard Magnetic Films |
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| LEI Yong,DAI Bo,SHAO Xiao-ping.Preparations and Studies of the SmCo5 Hard Magnetic Films[J].Journal of Sichuan Normal University(Natural Science),2012(1):105-108. |
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| Authors: | LEI Yong DAI Bo SHAO Xiao-ping |
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| Affiliation: | (School of Materials Science and Engineering,Southwest University of Science and Technology,Mianyang 621000,Sichuan) |
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| Abstract: | With the Cr layer as an underlayer and a caplayer,SmCo5 thin films were prepared on the silicon in DC co-sputtering,which had been annealed at different temperatures.Then the samples’ structures,compositions,and magnetic properties were characterized.The results show that after being annealed at 550 ℃ for 30 min the samples had preferable hard magnetic properties and the coercively about 1 738 Oe. |
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| Keywords: | SmCo5 thin film co-sputtering annealing temperature coercively |
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