Chemo-mechanical grinding by applying grain boundary cohesion fixed abrasive for monocrystal sapphire |
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| Affiliation: | 1. Key Laboratory for Precision and Non-Traditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian, 116024, China;2. Key Laboratory of Marine Materials and Related Technologies, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo, 315201, China;3. Changzhou Institute of Dalian University of Technology, Changzhou, 213164, China;1. College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China;2. College of Mechanical Engineering, Yancheng Institute of Technology, Yancheng 224051, China;1. State Key Laboratory of Tribology, Tsinghua University, Beijing 100084, China;2. Shenzhen Key Laboratory of Micro/Nano Manufacturing, Research Institute of Tsinghua University in Shenzhen, Shenzhen 518057, China;1. Institute of Manufacturing Engineering, Huaqiao University, Xiamen, Fujian, 361021, China;2. Institute of Mechanical Engineering and Automation, Huaqiao University, Xiamen, Fujian, 361021, China;3. State Key Laboratory of Nonlinear Mechanics, Institute of Mechanics, Chinese Academy of Sciences, Beijing 100190, China |
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| Abstract: | This paper presents a novel fixed abrasive tool namely grain boundary cohesion fixed abrasive pellet (GBCFAP) which is able to provide higher finishing efficiency as well as better surface/subsurface quality of sapphire substrate during the chemo-mechanical grinding (CMG) process. The manufacturing procedures of GBCFAP are introduced in detail in this paper. It is found that the sintering temperature plays an important role to the strength of GBCFAP, and the strength of GBFCAP could be flexibly adjusted by sintering temperature. The experiment result suggests that the recommended sintering temperature ranges from 600 to 650 °C according to current CMG conditions. Meanwhile, comparing with conventional resin bound CMG wheel, 600 °C sintered GBCFAP CMG wheel performs better in terms of material removal rate and surface/subsurface quality since the chemical effect and mechanical effect during CMG process are well balanced. Meanwhile, the solid phase reaction between sapphire and Cr2O3 abrasive is demonstrated by TEM observation and XPS quantification. |
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| Keywords: | Grain boundary cohesion fixed abrasive pellet Chemo-mechanical grinding Material removal rate Surface/subsurface quality Chemical/mechanical effect |
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