| 聚酰亚胺绝缘膜的真空性能及在电真空器件中的应用研究 |
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| 引用本文： | 李玲珍,郑姚生.聚酰亚胺绝缘膜的真空性能及在电真空器件中的应用研究[J].真空科学与技术学报,2001,21(3):220-222. |
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| 作者姓名： | 李玲珍 郑姚生 |
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| 作者单位： | 东南大学电子工程系 |
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| 摘 要： | 利用固体质谱仪和气体质谱仪分别进行了聚酰亚胺绝缘膜的表面成分及在高温烘烤过程中的放气性能和气体成分分析。结果表明，聚酰亚胺材料中不存在污染阴极的有害成分，并且经高温烘烤后，在300℃时的平衡压强小于1.9×10-3Pa。因此，它完全可以作为真空中的绝缘介质材料。
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| 关 键 词： | 聚酰亚胺 放气特性 质谱分析 |
| 文章编号： | 0253-9748(2001)03-0220-03 |
| 修稿时间： | 2000年7月3日 |
Study of Vacuum Properties of Polyimide Insulation Film and Its Application in Vacuum Devices |
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| LI Lingzhen,Zheng Yaosheng.Study of Vacuum Properties of Polyimide Insulation Film and Its Application in Vacuum Devices[J].JOurnal of Vacuum Science and Technology,2001,21(3):220-222. |
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| Authors: | LI Lingzhen Zheng Yaosheng |
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| Abstract: | The surface compositions of the polyimide insulation film,its degassing characteristics,and the residual gases compositions during high temperature annealing were studied with solid mass spectrometer and gas mass spectrometer,respectively.The results show that no harmful materials,which may contaminat the cathode,exist in the film;and that the film can be used in vacuum as an insulating material because the average base pressure of the vacuum system after a baking of 300 ℃ is lower than 1.9×10-3 Pa. |
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| Keywords: | Polyimide Degasification character Spectrum analysis |
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