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| 厚度对溶胶-凝胶法生长的ZnO薄膜光学性质的影响 | |
| 引用本文： | 吴颖超,张松海,娄辉,张伟风.厚度对溶胶-凝胶法生长的ZnO薄膜光学性质的影响[J].河南大学学报(自然科学版),2007,37(4):347-350. |
| 作者姓名： | 吴颖超 张松海 娄辉 张伟风 |
| 作者单位： | 1. 河南大学,物理与电子学院,微系统物理研究所,河南,开封,475001;漯河职业技术学院,机电工程系,河南,漯河,462000 2. 安阳钢铁公司职工大学,河南,安阳,455004 3. 河南大学,物理与电子学院,微系统物理研究所,河南,开封,475001 |
| 基金项目： | 河南省杰出人才创新基金资助项目(0421001500);;河南省高校创新人才培养工程资助课题 |
| 摘 要： | 利用sol-gel旋涂法在普通盖玻片上生长了ZnO薄膜,用光学透射谱、光致发光谱和原子力显微术研究了ZnO薄膜的光学性质和表面形貌.结果发现,在一定薄膜厚度范围内,紫外发光带和光学吸收边均随着薄膜厚度的减小而单调蓝移,且紫外发光强度递增,峰宽变大.综合光致发光谱、光学透射谱和薄膜表面形貌,对薄膜中晶粒尺寸、应力、缺陷等对光学性质的影响进行了讨论. |
| 关 键 词： | ZnO薄膜 厚度 光学性质 应力 |
| 文章编号： | 1003-4978（2007）04-0347-04 |
| 修稿时间： | 2006-09-16 |
Thickness Effect on Optical Properties of ZnO Thin Films Prepared by Sol-gel Process |
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| WU Ying-chao,ZHANG Song-hai,LOU Hui,ZHANG Wei-feng.Thickness Effect on Optical Properties of ZnO Thin Films Prepared by Sol-gel Process[J].Journal of Henan University(Natural Science),2007,37(4):347-350. | |
| Authors: | WU Ying-chao ZHANG Song-hai LOU Hui ZHANG Wei-feng |
| Abstract: | Zinc oxide(ZnO) thin films were prepared on glass substrates by sol-gel spin-coating method.The optical properties and surface morphologies of the films were investigated using photoluminescence(PL),optical transmission spectra,and atomic force microscope(AFM),respectively.The results showed that both the absorption edge and the PL peak blue-shifted with a decrease of thickness of the films,and that PL intensity and linewidth increased for the films with a smaller thickness.The grain sizes,stress,defects in... |
| Keywords: | ZnO thin films thickness optical properties stress |
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