Reaction Sintering of Submicrometer Silicon Powder |
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Authors: | Otto J Gregory Sang-Baek Lee Richard C Flagan |
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Affiliation: | Department of Chemical Engineering, University of Rhode Island, Kingston, Rhode Island 02881;Division of Engineering and Applied Science, California Institute of Technology, Pasadena, California 91125 |
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Abstract: | Submicrometer silicon powder synthesized by thermally induced, vapor-phase reaction in an aerosol reactor was densified by reaction sintering to form Si3N4. The densification behavior of these spherical, nonagglomerated particles in the 0.1 to 0.2 μm size range is described. Competition between densification by silicon sintering and reaction product infilling was observed at typical reaction sintering temperatures. In addition, pore growth during the early stages of silicon presintering adversely affected nitrogen permeability and nitriding rates. The factors influencing the nitridation of ultrafine silicon powders are discussed. |
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