| 一种流量压力温度一体化传感器的设计 |
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| 引用本文： | 张宁,牛薇,徐冬,刘其中,汪洋.一种流量压力温度一体化传感器的设计[J].传感器与微系统,2011,30(11):105-107. |
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| 作者姓名： | 张宁 牛薇 徐冬 刘其中 汪洋 |
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| 作者单位： | 1. 中国电子科技集团公司第四十九研究所,黑龙江哈尔滨,150001
2. 第二炮兵驻哈军代室,黑龙江哈尔滨,150036 |
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| 摘 要： | 为了实现多参数综合测量,设计出一种小流量、压力、温度一体化传感器,该传感器主要由敏感元件和调理电路组成,信号输出采用0～5 V模拟输出.对传感器进行各项环境试验,试验结果表明:该传感器流量精度优于3％,压力精度优于0.2％,温度精度优于0.5％,流量热零点漂移小于0.2％ FS/℃,压力热零点漂移小于0.1％ FS/℃...
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| 关 键 词： | 流量 压力 温度 一体化传感器 |
Design of a kind of integrative sensor of flow pressure temperature |
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| ZHANG Ning,NIU Wei,XU Dong,LIU Qi-zhong,WANG Yang.Design of a kind of integrative sensor of flow pressure temperature[J].Transducer and Microsystem Technology,2011,30(11):105-107. |
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| Authors: | ZHANG Ning NIU Wei XU Dong LIU Qi-zhong WANG Yang |
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| Affiliation: | ZHANG Ning1,NIU Wei1,XU Dong1,LIU Qi-zhong2,WANG Yang1(1.The 49th Research Institue of China Electronics Technology Group Corporation,Harbin 150001,China,2.Second Artillery Corps of Chinese People's Liberation Army,Military Representative Room in Harbin,Harbin 150036,China) |
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| Abstract: | The principle,design technology and fabrication of a kind of integrative sensor of small flow,pressure,temperature is introduced.The sensor is made up of sensitive element and modulating circuit is introduced.The signal output ranges 0 ～5V.Various environmental experiments are carried out on transducers,the results show that the flow precision reaches 3 %,the pressure precision reaches 0.2 %,the temperature precision reaches 0.5 %,and the flow thermal zero drift is less than 0.2 %FS/℃,the pressure thermal zero drift is less than 0.1 %FS/℃.This transducer can satisfy the request of user. |
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| Keywords: | flow pressure temperature integrative sensor |
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