| ST切型石英膜片的应力分析 |
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| 引用本文： | 舒茂盛,王生楠,何鹏举.ST切型石英膜片的应力分析[J].传感技术学报,2005,18(2):430-432. |
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| 作者姓名： | 舒茂盛 王生楠 何鹏举 |
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| 作者单位： | 西北工业大学,航空学院,西安,710072;西北工业大学,自动化学院,西安,710072 |
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| 摘 要： | 通常石英膜片的应力分布是根据弹性力学薄板弯曲理论分析得到的,但所选模型及边界条件相对简单,不能满足实际工程的需要.文中的ST切型石英膜片的边界条件复杂,用弹性力学薄板弯曲理论是很难得出结果的,为此采用了有限元法对ST切型石英膜片进行应力分析,并根据其应力分布规律,得出合理安放SAW(表面波)谐振器的位置.
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| 关 键 词： | ST切型石英膜片 SAW压力传感器 应力分析 有限元法 |
| 文章编号： | 1005-9490(2005)02-0430-03 |
| 修稿时间： | 2004年9月27日 |
Stress Analyzing of ST Quartz Membrane |
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| S HU Maosheng,WA N G S hengnan,H E Pengj u.Stress Analyzing of ST Quartz Membrane[J].Journal of Transduction Technology,2005,18(2):430-432. |
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| Authors: | S HU Maosheng WA N G S hengnan H E Pengj u |
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| Abstract: | The stress distribution of a quartz membrane could be calculated by the elastic theory of plates and shells, but for simple geometry and simple boundary conditions, this method can't meet engineering demands. The finite element method is used to calculate the stress distribution for a rectangular ST quartz membrane with a central hole upon which a constant pressure acts. The stress distributions on the ST quartz membrane are given as the functions of several different radii and membrane thickness. The position of SAW pressure sensors can be determined by use of the stress distributions. |
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| Keywords: | ST quartz membrane SAW pressure sensors stress analysis finite element method |
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