| Modified textured surface MOCVD-ZnO:B transparent conductive layers for thinfilm solar cells |
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| 作者姓名： | 陈新亮 闫聪博 耿新华 张德坤 魏长春 赵颖 张晓丹 |
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| 基金项目： | Project supported by the State Key Development Program for Basic Research of China （Nos. 2011CBA00705, 2011CBA00706, 2011CBA00707）, the Tianjin Applied Basic Research Project and Cutting-Edge Technology Research Plan, China （No. 13JCZDJC26900）, the Tianjin Major Science and Technology Support Project, China （No. 11TXSYGX22100）, and the Fundamental Research Funds for the Central Universities, China （No. 65010341）. |
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| 摘 要： | Modified textured surface boron-doped ZnO （ZnO：B） transparent conductive layers for thin-film solar cells were fabricated by low-pressure metal organic chemical vapor deposition （LP-MOCVD） on glass substrates. These modified textured surface ZnO：B thin films included two layers. The first ZnO：B layer, which has a pyramid- shaped texture, was deposited under conventional growth conditions, and the second layer, which has a sphere- like structure, at a relatively lower growth temperature. Typical bi-layer ZnO：B thin films exhibit a high electron mobility of 27.6 cm^2/（V.s） due to improved grain boundary states. For bi-layer ZnO：B, the haze value increases and the total transmittance decreases with the increasing film thickness of the second modification layer. When applied in hydrogenated microcrystalline silicon （μc-Si：H） thin-film solar cells, the modified textured surface ZnO：B layers present relatively higher conversion efficiency than conventional ZnO：B films.
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| 关 键 词： | 金属有机化学气相沉积 薄膜太阳能电池 透明导电层 氧化锌 表面 纹理 修改 LP-MOCVD |
Modified textured surface MOCVD-ZnO：B transparent conductive layers for thinfilm solar cells |
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| Chen Xinliang,Yan Congbo Geng Xinhua,Zhang Dekun,Wei Changchun,Zhao Ying,and Zhang Xiaodan.Modified textured surface MOCVD-ZnO:B transparent conductive layers for thinfilm solar cells[J].Chinese Journal of Semiconductors,2014(4):41-45. |
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| Authors: | Chen Xinliang Yan Congbo Geng Xinhua Zhang Dekun Wei Changchun Zhao Ying and Zhang Xiaodan |
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| Affiliation: | [1]Institute of Photo-Electronic Thin Film Devices and Technology, Nankai University, Tianjin 300071, China [2]Tianjin Key Laboratory of Photo-Electronic Thin Film Devices and Technology, Nankai University, Tianjin 300071, China [3]Key Laboratory of Opto-Electronic Information Science and Technology for Ministry of Education, Nankai University, Tianjin 300071, China |
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| Abstract: | zinc oxide thin films transparent conductive oxides MOCVD textured surface thin-film solar cells |
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| Keywords: | zinc oxide thin films transparent conductive oxides MOCVD textured surface thin-film solar cells |
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