用于光学调整的二维纳米级微动台的设计分析

研究开发了一种用于光学调整的二维压电驱动的纳米级微动工作台,建立了工作台的力学模型,并利用结构力学理论推导出工作台沿X、Y方向刚度及前二阶固有频率的解析式。通过微动工作台固有频率及沿X、Y方向刚度的实验测试,验证了解析方法和有限元方法用于微动工作台设计分析的可行性。有限元分析结果表明,可通过改变直角平板柔性铰链的特征参数,达到控制和优化工作台固有频率、输出位移、应力分布及驱动力响应的目的,并提出一种初选微动工作台柔性铰链参数的简易方法。

Design and analysis of 2-DOF nanopositioning stage for optical alignment

A two-degree-of-freedom (2-DOF) piezo-driven nanopositioning stage is presented to align optical system. In this paper, the mechanical model of the nanopositioning stage is established. General equations for calculating the stiffness and resonant frequency of the stage were deduced according to the theory of structural mechanics. The comparative results of the theory, finite element analysis (FEA) and experiments show the accuracy of the theoretical model and the validity of FEA. FEA of static and dynamic behaviors of the nanopositioning stage are performed and a simple procedure is developed to find the proper dimensions of the nanopositioning stage. FEA results indicate that designers can control and optimize static and dynamic performance of the nanopositioning stage to achieve the desired response of the micropositioning system by modifying the flexure hinge dimensions.