Densification,flexural strength and dielectric properties of CaO-MgO-ZnO-SiO2/Al2O3 glass ceramics for LTCC applications

Novel glass ceramics for LTCC applications with high flexural strength can be achieved by CaO-MgO-ZnO-SiO₂(CMSZ) glass cofiring with Al₂O₃. The sintering shrinkage behavior, crystalline phases, mechanical and dielectric properties, and thermal expansion of the CMZS/Al₂O₃ glass ceramic were determined. The X-ray diffraction results revealed that multiphases (CaMgSi₂O₆, Al₂Ca(SiO₄)₂ and ZnAl₂O₄) formed in the sintering process of the CMZS/Al₂O₃ glass ceramic. The flexural strength of CMZS/Al₂O₃ glass ceramics first increases and then decreases with increasing Al₂O₃ content. The CMZS/Al₂O₃ glass ceramic with 50 wt % Al₂O₃ sintered at 890 °C for 2 h achieved the best performance, with a maximum flexural strength of 256 MPa, dielectric constant (ε_r) of 7.89, dielectric loss (tan δ) of 3.41 × 10^?3 (12 GHz), temperature coefficient of resonance frequency (τ_f) of ?29 ppm/°C, and the CTE value of 7.93 × 10^?6/°C.