| 高频等离子固相外沉积工艺参数在线测量系统研究 |
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| 引用本文： | 秦卫光,邵明强,孙丽丽,刘晓光.高频等离子固相外沉积工艺参数在线测量系统研究[J].中国建材科技,2017,26(3):68-69. |
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| 作者姓名： | 秦卫光 邵明强 孙丽丽 刘晓光 |
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| 作者单位： | 久智光电子材料科技有限公司 |
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| 基金项目： | 本论文受到河北省重大科技成果转化项目：光纤预制棒用大尺寸石英套管产业化项目（项目编号：17041106Z）的资助。 |
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| 摘 要： | 高频等离子固相外沉积工艺工程中沉积温度和沉积量是最为关键的工艺参数,但受到沉积车间温度、强光照和高频信号干扰等不利条件的限制,常规测量方法无法实现精确测量。本文根据工艺特性采用红外测温和影像测量的手段实现工艺过程的在线精确测量,提升了工艺控制精度和石英材料产品品质。
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| 关 键 词： | 高频等离子沉积工艺 红外测温 影像测量 |
The research of on-line measurement system of high-frequency plasma solid outside deposition process parameters |
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| Qin Weiguang,Zhao Mingqiang,Sun Lili,Liu Xiaoguang.The research of on-line measurement system of high-frequency plasma solid outside deposition process parameters[J].China Building Materials Science & Technology,2017,26(3):68-69. |
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| Authors: | Qin Weiguang Zhao Mingqiang Sun Lili Liu Xiaoguang |
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| Abstract: | The deposition temperature and deposition rate of the high-frequency plasma solid outside deposition process are the most critical process parameters, but subject to a number of unfavorable conditions, such as temperature of deposition plant, strong light and high frequency signal interference, conventional measurement methods can not achieve accurate measurements. This article is based on process characteristics, using infrared temperature measurement and image measurement means to achieve on-line accurate measurement process, improve the process control accuracy and quartz material product quality |
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| Keywords: | high-frequency plasma deposition process infrared temperature measurement image measurement |
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