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高折射率镀膜聚合物波导传感器的制备
引用本文:谭冰,蔡斌.高折射率镀膜聚合物波导传感器的制备[J].光学仪器,2022,44(1):87-94.
作者姓名:谭冰  蔡斌
作者单位:上海理工大学 光电信息与计算机工程学院,上海 200093
基金项目:上海市自然科学基金会面上项目(20ZR437400)
摘    要:为了提高利用倏逝波传感的光纤传感器的灵敏度问题,仿真并验证了一种基于高折射率镀膜的光纤传感器.首先两根光纤之间利用激光诱导波导自行成技术形成聚合物波导,并在波导表面镀上一层高折射率Ta2O5薄膜以增强波导表面倏逝波强度,从而增加传感器灵敏度.根据聚合物波导制备结果,使用COMSOL Multiphysics?软件对Ta...

关 键 词:Ta2O5镀膜  COMSOL  Multiphysics®  聚合物光波导  倏逝波传感
收稿时间:2021/3/23 0:00:00

Preparation of high-refractive-index film coated polymer waveguide fiber sensor
TAN Bing,CAI Bin.Preparation of high-refractive-index film coated polymer waveguide fiber sensor[J].Optical Instruments,2022,44(1):87-94.
Authors:TAN Bing  CAI Bin
Affiliation:School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China
Abstract:To improve the sensitivity of optical waveguide sensor based on evanescent wave sensing, a kind of high-refractive-index film coated waveguide optical fiber sensor is proposed by simulation and verified by experiment. In this study, we propose an optical fiber-waveguide-fiber EF sensing platform, which composes of a Ta2O5 coated polymer waveguide sandwiched by two multimode optical fibers, to enhance the intensity of evanescent wave and increase the sensitivity of the sensor. Through simulation results, the Ta2O5 film thickness was optimized. We selected 70 nm, 100 nm and 150 nm thickness for the coating experiments. With the coating thickness of 100 nm, we achieved absorption spectrum limit of detection for Rh B of 1×10?8 g/mL. The sensor has the advantages of low cost, small volume, simple manufacture and high sensitivity, which can be widely used in various fields.
Keywords:Ta2O5 coating  COMSOL Multiphysics?  polymer waveguide  evanescent wave sensing
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