Microgrippers created in microstructurable glass |
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| Authors: | R Salim H Wurmus A Harnisch D Hülsenberg |
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| Affiliation: | (1) Technical University of Ilmenau Department of Microsystems Technologies P.O. Box 100565 D-98684 Ilmenau, Germany, DE;(2) Technical University of Ilmenau Institute of Glass/Ceramics-Technologies P.O. Box 100565 D-98684 Ilmenau, Germany, DE |
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| Abstract: | In this paper a new microgripper will be presented. The specific feature is the microfabrication based on a UV-lithographic
process in microstructurable, photosensitive glass. Technological and manufacturing problems of the gripper will be described.
The developed microgripper is actuated by a piezoelectric ceramic (monomorph). Glass microstructures are used as solid state
hinges. With the special design of the gripper it is possible to realise a high distance ratio. The deflection of the gripping
arms is some hundred micrometers. The gripping forces are a few mN up to 50 mN. The new grippers were fabricated and tested
successfully.
Received: 20 December 1996/Accepted: 9 January 1997 |
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