| 非平衡磁控溅射La-Ti/WS2 自润滑薄膜的摩擦磨损行为 |
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| 引用本文： | 蔡海潮,薛玉君,李航,叶军,王景华.非平衡磁控溅射La-Ti/WS2 自润滑薄膜的摩擦磨损行为[J].稀有金属材料与工程,2021,50(8):2708-2714. |
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| 作者姓名： | 蔡海潮 薛玉君 李航 叶军 王景华 |
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| 作者单位： | 河南科技大学 机电工程学院，河南 洛阳 471003;洛阳轴承研究所有限公司，河南 洛阳 471039,河南科技大学 机电工程学院，河南 洛阳 471003;河南科技大学 河南省机械设计及传动系统重点实验室，河南 洛阳 471003,河南科技大学 机电工程学院，河南 洛阳 471003;河南科技大学 河南省机械设计及传动系统重点实验室，河南 洛阳 471003,河南科技大学 机电工程学院，河南 洛阳 471003;洛阳轴承研究所有限公司，河南 洛阳 471039,洛阳轴承研究所有限公司，河南 洛阳 471039 |
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| 基金项目： | National Basic Research Project (JCKY2018419C101); Project of Science and Technology Development of Henan Province (202102210073) |
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| 摘 要： | 要满足航天器机械转动部件在恶劣工况下的工作，需研制高硬度、低摩擦系数的固体润滑薄膜。采用非平衡磁控溅射法分别制备了纯WS2薄膜、Ti掺杂WS2复合薄膜和La-Ti掺杂WS2复合薄膜。分析了薄膜的微观形貌、成分、硬度和摩擦学性能。结果表明，与纯WS2薄膜和Ti/WS2复合薄膜相比，La-Ti/WS2复合薄膜的微观结构更加致密。La-Ti/WS2复合薄膜的硬度H和弹性模量E也显著提高。此外，La-Ti/WS2复合薄膜的摩擦系数减小，并且H/E比值增大，La-Ti/WS2复合薄膜的磨损率降低。结果表明，La的掺杂有助于在摩擦接触表面形成稳定的转移膜，提高La-Ti/WS2复合薄膜的耐磨性和承载能力。
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| 关 键 词： | La-Ti/WS2复合薄膜 非平衡磁控溅射 减摩 耐磨 |
| 收稿时间： | 2020/6/18 0:00:00 |
| 修稿时间： | 2020/8/20 0:00:00 |
Friction and Wear Behavior of Self-lubricating La-Ti/WS2 Films by Unbalanced Magnetron Sputtering |
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| Cai Haichao,Xue Yujun,Li Hang,Ye Jun and Wang Jinghua.Friction and Wear Behavior of Self-lubricating La-Ti/WS2 Films by Unbalanced Magnetron Sputtering[J].Rare Metal Materials and Engineering,2021,50(8):2708-2714. |
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| Authors: | Cai Haichao Xue Yujun Li Hang Ye Jun and Wang Jinghua |
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| Affiliation: | School of Mechatronics Engineering, Henan University of Science and Technology, Luoyang 471003, China;Luoyang Bearing Research Institute Co., Ltd, Luoyang 471039, China,School of Mechatronics Engineering, Henan University of Science and Technology, Luoyang 471003, China;Henan Key Laboratory for Machinery Design and Transmission System, Henan University of Science and Technology, Luoyang 471003, China,School of Mechatronics Engineering, Henan University of Science and Technology, Luoyang 471003, China;Henan Key Laboratory for Machinery Design and Transmission System, Henan University of Science and Technology, Luoyang 471003, China,School of Mechatronics Engineering, Henan University of Science and Technology, Luoyang 471003, China;Luoyang Bearing Research Institute Co., Ltd, Luoyang 471039, China,Luoyang Bearing Research Institute Co., Ltd, Luoyang 471039, China |
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| Abstract: | The solid lubrication films with high hardness and low friction coefficient should be developed to satisfy the severe working conditions of mechanical rotating parts of spacecraft. The pure WS2 film, Ti doped WS2 composite film (Ti/WS2) and La-Ti doped WS2 composite film (La-Ti/WS2) were prepared by unbalanced magnetron sputtering. The micro morphology, composition, hardness and tribological performance of the films were examined. Results show that compared with pure WS2 films and Ti/WS2 composite films, the microstructure of La-Ti/WS2 composite film becomes more compact. Meanwhile, the hardness and elastic modulus of La-Ti/WS2 composite film also increase significantly. Furthermore, the friction coefficient of La-Ti/WS2 composite film decreases, and the hardness/elastic modulus (H/E) ratio of La-Ti/WS2 composite film increases, which suggests that the wear rate of La-Ti/WS2 composite film is reduced. It is indicated that La doping contributes to the formation of stable transfer film on the friction contact surface, and thus improves the wear resistance and carrying capacity of La-Ti/WS2 composite film. |
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| Keywords: | La-Ti/WS2 composite films unbalanced magnetron sputtering low friction wear resistance |
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