类金刚石薄膜光学特性的椭偏法研究

本文采用脉冲电弧离子镀的方法,在p型硅上沉积类金刚石薄膜,用椭偏法测试薄膜的光学常数.根据沉积方法的特点,建立一个四层结构的膜系,并由每一层的吸收情况合理选择色散关系;结合透过率的测试结果,利用光度法给测出薄膜折射率和厚度的估计值,作为椭偏法拟合的初值,拟合效果良好,得到薄膜的折射率、消光系数和几何厚度.

Study on Optical Properties of Diamond-Like Carbon with Ellipsometry

Optical properties characterization with ellipsometry of the diamond-like carbon films,grown on p-type Si substrate by pulsed arc deposition, has been successfully developed. In the technique four-layer model was proposed, including substrate, a mixed layer of Si and C, diamond-like carbon film and rough surface. First, an appropriate dispersion of each layer is estimated according to its absorption. Next, at a given transmittance the refractive index and thickness of the film determined with spectrophometry, were taken as the initial values of our ellipsometry data fitting. Finally, various parameters of the film, including its refractive index, it extinction index and its thickness, can be fairly accurately evaluated in satisfactory agreement with the experiment.