基于电容-电阻转换原理的柔性压力传感器 |
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引用本文: | 刘秋雨,叶秉泽,王梓菡,柳星雨,侯郑龙,聂 萌.基于电容-电阻转换原理的柔性压力传感器[J].测控技术,2022,41(6):10-14. |
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作者姓名: | 刘秋雨 叶秉泽 王梓菡 柳星雨 侯郑龙 聂 萌 |
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作者单位: | 东南大学 电子科学与工程学院
MEMS教育部重点实验室 |
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基金项目: | 国家级大学生创新创业项目(202110286055);江苏省自然科学基金面上项目(BK20201268) |
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摘 要: | 目前,基于碳基纳米材料的柔性压力传感器凭借着其便携性、柔韧性、生物相容性和低成本等特点,在智能医疗、人机交互和智能机器人等领域有着广泛的应用前景,但如何使其在具有较大量程范围的同时保持较高灵敏度,仍是一个严峻的挑战。提出一种基于氧化石墨烯/碳纳米管(Graphene Oxide/Carbon Nanotube, GO/CNT)复合敏感层的柔性压力传感器,同时以热塑性聚氨酯弹性体(Thermoplastic Polyurethanes, TPU)多孔海绵作为传感器骨架。该GO/CNT@TPU柔性压力传感器的量程范围为0~60 kPa,基于电容-电阻转换原理,当受到较小压力(0~5 kPa)时,传感器以电阻感知为主,灵敏度为0.05777 kPa-1;当受到较大压力(5~60 kPa)时,传感器以电容感知为主,灵敏度为0.33213 kPa-1。从而有效地实现了传感器的在宽量程内的高灵敏度检测。
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关 键 词: | 柔性 压力传感器 GO/CNT复合敏感层 电容-电阻转换 |
Flexible Pressure Sensor Based on Capacitance-Resistance Conversion Principle |
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Abstract: | At present,with the characteristics of portability,flexibility,biocompatibility and low cost,the flexible pressure sensor based on carbon nano materials has a wide application prospect in the fields of intelligent medicine,human-computer interaction and intelligent robot.However,how to make it maintain high sensitivity with a large range is still a severe challenge.A flexible pressure sensor based on graphene oxide/carbon nanotube(GO/CNT) composite sensitive layer is proposed,and thermoplastic polyurethanes (TPU) porous sponge is used as the sensor skeleton.Based on the capacitance-resistance conversion principle,the sensitivity of the GO/CNT@TPU pressure sensor is 0.05777 kPa-1 in the small pressure (0~5 kPa) with the resistance sensing,and the sensitivity is 0.33213 kPa-1 in the large pressure (5~60 kPa) with the capacitive sensing,which effectively realizes the high sensitivity detection of the sensor in a wide range. |
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Keywords: | flexibility pressure sensor GO/CNT composite sensitive layer capacitance-resistance conversion |
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