等离子体化学气相沉积法制备致密性超浸润纳米硅氟薄膜

以含氟丙烯酸酯功能单体和硅烷为原料、无水乙醇为溶剂、氩气为工艺气体,经等离子体化学气相沉积在表面绝缘阻抗(SIR)测试板和无尘布上制得硅氟薄膜.探讨了硅烷种类和用量、含氟单体用量对镀硅氟薄膜试件性能的影响.结果表明,采用γ-甲基丙烯酰氧基丙基三甲氧基硅烷(KH 570)、γ-氨丙基三乙氧基硅烷(KH 550)和乙烯基三...

Preparation of Dense Super-infiltrating Nanosilica-fluorine Films by Plasma Chemical Vapor Deposition

Silicone-fluorine films were prepared by plasma chemical vapor deposition on surface insulation impedance(SIR)test board and dust-free cloth,with fluoro-acrylate functional monomer and silane as raw materials,absolute ethanol as solvent and argon as process gas.The effects of the types and amount of silane and the amount of fluorine monomer on the properties of silicon-plated fluorine film SIR test board were discussed.The results show that the static water contact angles of KH 570,KH 550 and A171 SIR test board are 136.0°,135.6°and 135.7°,respectively.After 200 times,friction,they drop by 7.5°,10.2°and 11.9°,respectively.The power-on time is 30 min,5 min and 3min,respectively,and the surface roughness gradually decreases.With KH 570 increases from 0.2 phr to 5 phr,the power-on time of silicon-fluorine coated SIR test board gradually extends from 8 min to 33 min.With the increase of fluorine monomer from 78 phr to 93 phr,the static water contact angle of silicon-fluorine film SIR test board increases from 126°to 154°.KH 570 is selected as the best silane.The preferred silane is 2 phr of KH 570,and the preferred fluorine-containing acrylate functional monomer is 90 phr.At this time,silicon-coated fluorine film SIR test board has the static water contact angle of 136.0°,30 min of power-on time.