The influence of a hydride preflow on the crystalline quality of InP grown on exactly oriented (100)Si |
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Authors: | A Lubnow G P Tang H -H Wehmann A Schlachetzki E Bugiel P Zaumseil |
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Affiliation: | (1) Inst. f. Halbleitertechnik, D-W-3300 TU Braunschweig, Braunschweig, Germany;(2) Inst. f. Halbleiterphysik, D-O-1200 Frankfurt/Oder, Germany |
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Abstract: | Several microns thick epitaxial InP films have been successfully deposited on exactly oriented (100) Si substrates by metal-organic
vapour-phase epitaxy. We have studied the influence of a hydride preflow before buffer growth on the crystalline quality of
the InP by measuring the surface roughness, by X-ray diffractometry, TEM and SEM investigations, and by detection of anti-phase-domains.
Generally, an AsH3 preflow instead of PH3 improved the crystalline perfection considerably. Furthermore, if AsH3 is introduced only during cool-down between 700 and 900° C after the thermal cleaning step anti-phase-domain free InP is
grown. |
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Keywords: | InP-on-Si heteroepitaxy MOVPE hydride preflow |
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