单晶生长用AlN粉料的烧结提纯工艺实验研究 |
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引用本文: | 汪佳,曹凯,刘理想,吴亮.单晶生长用AlN粉料的烧结提纯工艺实验研究[J].半导体光电,2017,38(6):830-833. |
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作者姓名: | 汪佳 曹凯 刘理想 吴亮 |
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作者单位: | 上海大学材料科学与工程学院,省部共建高品质特殊钢冶金与制备国家重点实验室,上海市钢铁冶金新技术开发应用重点实验室,上海200072;上海大学材料科学与工程学院,省部共建高品质特殊钢冶金与制备国家重点实验室,上海市钢铁冶金新技术开发应用重点实验室,上海200072;上海大学材料科学与工程学院,省部共建高品质特殊钢冶金与制备国家重点实验室,上海市钢铁冶金新技术开发应用重点实验室,上海200072;上海大学材料科学与工程学院,省部共建高品质特殊钢冶金与制备国家重点实验室,上海市钢铁冶金新技术开发应用重点实验室,上海200072 |
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摘 要: | 使用自主研发的钨系统中频感应加热炉对AlN粉料进行了烧结提纯处理实验,并用XRD、SEM、IGA和GDMS等表征方法分析了烧结后的样品.实验发现,高温(2 250℃)长时间(50 h)烧结提纯工艺效果显著,但AlN粉料损耗高达47.37%;而低温(小于2 000℃)分段式短时间(每段10h)烧结提纯工艺粉料损耗低于2%,但是提纯效果一般.通过对实验结果的综合分析,提出了一种AlN粉料烧结提纯的改进工艺,最终得到了氧含量仅238 ppm、碳含量135 ppm的高质量AlN单晶生长原料,并且显著增加了原料的利用率.
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关 键 词: | AlN粉料 氧杂质 碳杂质 烧结提纯 AlN单晶生长 |
收稿时间: | 2017/4/10 0:00:00 |
Experimental Research on AlN Powder Source Purification by Sintering Process for AlN Crystal Growth |
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Abstract: | In this paper,two sintering experiments were conducted on a proprietary medium radio-frequency induction reactor with a tungsten setup.XRD,SEM,IGA and GDMS were used to analyze the obtained sintered samples.Experiments show that oxygen and carbon impurities can be effectively removed for the process sintering at 2 250 ℃ with 50 h holding time,but with AlN powder source loss of 47.37%.On the other hand,for the sintering temperature below 2 000 ℃,the process is not sufficient enough to reduce oxygen and carbon impurities,although the AlN powder source loss is below 2%.Based on the experimental results,a sintering process is proposed,which can produce high-quality AlN powder source with oxygen and carbon concentrations at 238 ppm and 135 ppm respectively,and maintain low loss of AlN powder as well. |
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Keywords: | AlN powder oxygen impurity carbon impurity sintering purification AlN single crystal growth |
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