| 半导体激光端点干涉测长法原理探讨 |
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| 引用本文： | 侯德胜.半导体激光端点干涉测长法原理探讨[J].光电工程,1997(4). |
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| 作者姓名： | 侯德胜 |
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| 作者单位： | 中国科学院光电技术研究所微细加工光学技术国家重点实验室 |
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| 基金项目： | 中国科学院光电技术研究所微细加工光学技术国家重点实验室基金 |
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| 摘 要： | 阐述利用半导体激光的频率变化和波长变化测量干涉仪光程差的基本原理，探讨一种在长度的两个端点干涉测量长度的新方法，即端点干涉测长法的原理，推导这种方法测量长度的公式，指出这种方法区别于其它干涉测长方法的独特优点，最后讨论测量中的注意事项以及需要深入研究的问题。
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| 关 键 词： | 激光干涉术，半导体激光器，光程差测量，长度测量，频率相关 |
Principle Investigations for the Interferometric Length Measurement at Endpoints with Semiconductor Laser |
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| Hou Desheng.Principle Investigations for the Interferometric Length Measurement at Endpoints with Semiconductor Laser[J].Opto-Electronic Engineering,1997(4). |
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| Authors: | Hou Desheng |
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| Abstract: | The basic principle of a new method for the measurement of the length at two endpoints through the measurement of optical path difference by use of the frequency and wavelength variations is described in the paper.A new length interferometry,i.e.,endpoint length interferometry is investigated.Some formulae for the length measurement are derived.The unique advantages of the length interferometry are pointed out in the paper.Some important notices and other problems which should be further investigated in the measurement are discussed. |
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| Keywords: | Laser interferometry Semiconductor lasers Optical path difference measurement Length measurement Frequency correlation |
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