| 膜片电容式压力传感器理论公式推导 |
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| 引用本文： | 孙序文.膜片电容式压力传感器理论公式推导[J].山东理工大学学报,1994(3). |
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| 作者姓名： | 孙序文 |
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| 作者单位： | 山东工程学院计算机工程系 |
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| 摘 要： | 本文详细推导了固定圆周膜片电容式压力传感器的理论公式。
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| 关 键 词： | 传感器 电容 压力 |
The Derivation of Calculation Formula for Capacitive Pressure Sensors With The Diaphragm Restrained Around its Circumference |
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| Sun Xuwen.The Derivation of Calculation Formula for Capacitive Pressure Sensors With The Diaphragm Restrained Around its Circumference[J].Journal of Shandong University of Technology:Science and Technology,1994(3). |
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| Authors: | Sun Xuwen |
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| Affiliation: | Department of Computer Engineering |
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| Abstract: | Calculation formula for capacitive pressure sensors with the diaphragm restrained around its circumference has been derived in this paper, which could be used to calculate the pressure measured by this kind of sensors. |
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| Keywords: | Sensor Capacitance Pressure |
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