| 非接触式预对准系统及控制技术研究 |
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| 引用本文： | 刘玄博,孙广翔.非接触式预对准系统及控制技术研究[J].电子工业专用设备,2014(2):18-22. |
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| 作者姓名： | 刘玄博 孙广翔 |
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| 作者单位： | 中国电子科技集团公司第四十五研究所,北京100176 |
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| 摘 要： | 高精度高效率的预对准系统是现代集成电路（IC）生产中实现晶圆自动传输的重要部件。介绍了预对准台的大致设计结构,分析了目前常见的找心算法以及存在的问题,进而提出新的找圆心算法。之后针对带切边晶圆片的切边方向定位算法进行了分析归纳,总结出完整的切边定位算法。
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| 关 键 词： | 预对准 圆心校正 切边校正 |
Research for Non-contact Pre-alignment System and Control Technology |
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| LIU Xuanbo,Sun Guangxiang.Research for Non-contact Pre-alignment System and Control Technology[J].Equipment for Electronic Products Marufacturing,2014(2):18-22. |
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| Authors: | LIU Xuanbo Sun Guangxiang |
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| Affiliation: | (The 45^th Research Institute of CETC, Beijing 100176, China) |
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| Abstract: | High-precision efficiency system is a very important component in modern IC manufacture. At first, a concise construction is introduced in this paper, and then point to used circle-fitting algorithm, a new fitting algorithm is showed. At last, the analysis and conclusion is made for wafer with loader to locate the loader and generate a intact wafer-loader fitting algorithm. |
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| Keywords: | Pre-align Circle fitting Wafer loader fitting |
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