| 多晶硅生产中氢气的来源与净化 |
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| 引用本文： | 陈自力,青晨,杨云,张剑锋.多晶硅生产中氢气的来源与净化[J].低温与特气,2012,30(6):21-23. |
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| 作者姓名： | 陈自力 青晨 杨云 张剑锋 |
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| 作者单位： | 1. 陕西天宏硅材料有限责任公司,陕西咸阳,712000
2. 四川天一科技股份有限公司,四川成都,610225 |
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| 摘 要： | 简述了多晶硅生产过程中氢气的几个来源,并比较了采用电解、裂解或工业尾气净化回收氢气作为多晶硅生产补充氢气来源的技术、经济性。提出了采用特定吸附剂,变压吸附净化回收可重复利用氢气的新方法。对比了几种氢气的净化回收技术的优势,认为采用变压吸附（PSA）氢气净化工艺过程最优,能耗最低,经济效益最好。
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| 关 键 词： | 多晶硅 变压吸附 净化回收 氢源 |
Hydrogen Source And Purification in Polysilicon Production |
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| CHEN Zili
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QING Chen
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YANG Yun
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ZHANG Jianfeng.Hydrogen Source And Purification in Polysilicon Production[J].Low Temperature and Specialty Gases,2012,30(6):21-23. |
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| Authors: | CHEN Zili QING Chen YANG Yun ZHANG Jianfeng |
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| Affiliation: | 1.Shanxi Tianhong Silicon Material Co.,Ltd.,Xianyang 712000,China; 2.Sichuan Tianyi Science & Technology Co.,Ltd.,Chengdu 610225,China) |
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| Abstract: | This paper describes several sources of hydrogen in the polysilicon production process,and compared the technology,economics that recovery of hydrogen as a polysilicon production supplemental source by electrolysis,cracking or industrial exhaust gas purification.Proposed a new method using a specific adsorbent,the pressure swing adsorption purification and recovery can be repeated using hydrogen.Comparing several hydrogen purification and recovery technology advantage,the hydrogen purification by pressure swing adsorption（PSA） process is optimal,the lowest energy consumption,the best economic benefits. |
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| Keywords: | polysilicon PSA purification recovery hydrogen source |
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