激活能测试装置设计及微晶硅薄膜激活能测试

为了分析微晶硅薄膜的本征特性,设计了激活能测试装置。测试装置包括测试平台、真空系统和加热控制系统。同时给出激活能计算方法,并对不同电压、不同取点个数对激活能测试的影响进行分析。分析结果表明,不同测试电压对激活能测试结果影响很小,不同取点个数计算的激活能差别也很小。

The design of activation energy measurement equipment and measurement of activation energy of microcrystalline silicon thin films

Activation energy measurement equipment were designed to analysis the intrinsic property of microcrystalline silicon film. The equipment included the measurement platform, the vacuum system and heating control system of equipment. The computation method of activation energy was also put forward. The effect of different voltages and different dot numbers on the activation energy measuring were analyzed. The result showed that both different voltage and different dot numbers have little effect on the activation energy result.