双辉等离子渗钽对TiAlN/Ta复合涂层结构和性能的影响

采用Ta层作为过渡层，通过双辉等离子渗金属（DGPSA）与射频磁控溅射（RFMS）辅助直流脉冲磁控溅射技术（DCPMS）制备TiAlN/Ta复合涂层。借助掠入射XRD、SEM、AFM、纳米压痕、划痕以及摩擦磨损测试了不同工艺制备的Ta过渡层对复合涂层的相结构、表面（截面）形貌、硬度、结合力、韧性和摩擦磨损性能的影响。结果表明，TiAlN复合涂层在高偏压作用下结构致密，RFMS技术制备的Ta过渡层为柱状晶结构，复合涂层表面粗糙度较小，硬度较大而磨损稳定性和耐磨性较差；而DGPSA技术制备的Ta过渡层为纳米晶结构，复合涂层表面粗糙度较大，硬度降低但磨损稳定性与耐磨性都增强。对比发现，通过DGPSA技术制备Ta过渡层使得TiAlN/Ta复合涂层的结合力与韧性大幅度提高。

Effects of Double Glow Plasma Alloying Ta Layer on Structure and Properties of TiAlN/Ta Composite Coatings

Using metal Ta layer as a transition layer, the TiAlN/Ta composite coatings were prepared by double glow plasma surface alloying (DGPSA) and RF magnetron sputtering (RFMS) with DC pulsed magnetron sputtering technique (DCPMS). The phase structure, surface (cross-section) topography, hardness, adhesion strength, toughness and friction and wear properties of the composite coatings were investigated by grazing incidence X-ray diffraction (GIXRD), scanning electron microscopy (SEM), atomic force microscopy (AFM), nanoindentation, scratches, and friction and wear tests. It is found that the structure of the composite coating is condensed under high bias pressure. The Ta transition layer prepared by RFMS technique has columnar crystal structure. The composite coating has low surface roughness, high hardness and poor wear stability and wear resistance. The Ta transition layer prepared by DGPSA technique has a nanocrystalline structure with increasing surface roughness, decreasing hardness, enhanced wear stability and wear resistance. In contrast, the adhesion and toughness of TiAlN/Ta composite coating are significantly improved by using DGPSA technique to prepare Ta transition layer.